SCHA63T MEMS Sensor

Murata's SCHA63T is a single-package industrial 6DoF (degrees of freedom) component with a high level of performance for a low-cost micro-electro-mechanical systems (MEMS) solution. Sensors with this level of inertial sensor performance have usually only been available on expensive, high-end inertial measurement units (IMU) modules, making it costly for industrial and agricultural applications to gain the precision and accuracy they need. This sensor enables centimeter-level accuracy in machine dynamics and position sensing in harsh environments. It is made with Murata’s proven capacitive 3D-MEMS technology to accurately sense ±6 g acceleration in XYZ-axis and ±300°/s or ±125°/s angular rate in XYZ-axis with high precision. The gyroscope is cross-axis calibrated from the factory that enables better than 0.25% orthogonality error, as low as 1°/h level gyro bias instability, and a low noise density level of 0.0015°/s/√Hz for a stable system.

All the signals received from the MEMS sensor are processed using the two mixed-signal application-specific integrated circuits (ASICs) that use a flexible SPI digital interface. With the sensing elements and ASICs packaged into a RoHS-compliant, pre-molded 19.71 mm x 12.15 mm x 4.6 mm (l x w x h) SOIC 32-pin plastic housing design, the housing guarantees reliable operation over the product’s lifetime ensuring a safe, robust, and verified design. SCHA63T is perfect for safety-critical applications due to its extensive self-diagnostic features integrated into the MEMS and the custom ASIC. Furthermore, two of the three sensors have excellent linearity, vibration performance, stable offset, and sensitivity over the full temperature range of −40°C to +110°C. SCHA63T can assist in ensuring safe, robust, and verified designs.